Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685305 | Plasma processing apparatus and plasma processing method | Koji Maruyama, Masato Horiguchi, Tetsuri Matsuki | 2017-06-20 |
| 9607866 | Capacitive coupling plasma processing apparatus and method for using the same | Naoki Matsumoto, Chishio Koshimizu | 2017-03-28 |