Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828675 | Processing apparatus and processing method | Daisuke Morisawa, Keiji Osada | 2017-11-28 |
| 9583318 | Plasma processing apparatus, plasma processing method, and recording medium | Shigehiro Miura, Takeshi Kobayashi, Katsuaki Sugawara | 2017-02-28 |