Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828675 | Processing apparatus and processing method | Naohide Ito, Daisuke Morisawa | 2017-11-28 |
| 9766617 | Substrate processing apparatus | Junichi Ogawa, Youichi Nakayama, Hiroaki Dewa | 2017-09-19 |