YN

Youichi Nakayama

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
Overall (2017): #185,938 of 506,227Top 40%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9766617 Substrate processing apparatus Junichi Ogawa, Keiji Osada, Hiroaki Dewa 2017-09-19