Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9845531 | Substrate processing system | Junichi Ogawa | 2017-12-19 |
| 9828675 | Processing apparatus and processing method | Naohide Ito, Keiji Osada | 2017-11-28 |
| 9646864 | Substrate processing system and substrate transfer control method | — | 2017-05-09 |