Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818638 | Manufacturing method of semiconductor device | Yu-Yun Peng, Chung-Chi Ko | 2017-11-14 |
| 9679804 | Multi-patterning to form vias with straight profiles | Chun-Kai Chen, Jung-Hau Shiu, Chia-Cheng Chou, Chung-Chi Ko, Tze-Liang Lee +1 more | 2017-06-13 |
| 9659811 | Manufacturing method of semiconductor device | Yu-Yun Peng, Chung-Chi Ko | 2017-05-23 |
| 9567668 | Plasma apparatus, magnetic-field controlling method, and semiconductor manufacturing method | Chih-Chien Chi, Kuan-Chia Chen, Yao-Jen Chang, Huang-Yi Huang, Ching-Hua Hsieh | 2017-02-14 |