Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9567668 | Plasma apparatus, magnetic-field controlling method, and semiconductor manufacturing method | Chih-Chien Chi, Shing-Chyang Pan, Yao-Jen Chang, Huang-Yi Huang, Ching-Hua Hsieh | 2017-02-14 |