Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9817315 | System and method for supplying and dispensing bubble-free photolithography chemical solutions | Wen-Zhan Zhou, Hsu-Yuan Liu, Yu-Chen Huang, Cheng-Han Wu, Shih-Che Wang +1 more | 2017-11-14 |
| 9690212 | Hybrid focus-exposure matrix | Wen-Zhan Zhou, Yen-Liang Chen, Kai-Hsiung Chen, Chih-Ming Ke, Ho-yung David Hwang | 2017-06-27 |
| 9671685 | Lithographic plane check for mask processing | Chin-Hsiang Lin, I-Hsiung Huang, Chih-Chiang Tu, Chun-Jen Chen, Rick Lai | 2017-06-06 |
| 9632426 | In-situ immersion hood cleaning | Jui-Chun Peng | 2017-04-25 |
| 9601324 | Method of making wafer assembly | I-Hsiung Huang, Heng-Hsin Liu, Chin-Hsiang Lin | 2017-03-21 |