Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766554 | Method and apparatus for estimating focus and dose of an exposure process | Yen-Liang Chen, Kai-Hsiung Chen, Wen-Zhan Zhou | 2017-09-19 |
| 9690212 | Hybrid focus-exposure matrix | Wen-Zhan Zhou, Heng-Jen Lee, Yen-Liang Chen, Kai-Hsiung Chen, Ho-yung David Hwang | 2017-06-27 |
| 9594309 | Method and apparatus to characterize photolithography lens quality | Guo-Tsai Huang | 2017-03-14 |