Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9817315 | System and method for supplying and dispensing bubble-free photolithography chemical solutions | Heng-Jen Lee, Hsu-Yuan Liu, Yu-Chen Huang, Cheng-Han Wu, Shih-Che Wang +1 more | 2017-11-14 |
| 9766554 | Method and apparatus for estimating focus and dose of an exposure process | Yen-Liang Chen, Chih-Ming Ke, Kai-Hsiung Chen | 2017-09-19 |
| 9690212 | Hybrid focus-exposure matrix | Heng-Jen Lee, Yen-Liang Chen, Kai-Hsiung Chen, Chih-Ming Ke, Ho-yung David Hwang | 2017-06-27 |