Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766554 | Method and apparatus for estimating focus and dose of an exposure process | Yen-Liang Chen, Chih-Ming Ke, Wen-Zhan Zhou | 2017-09-19 |
| 9690212 | Hybrid focus-exposure matrix | Wen-Zhan Zhou, Heng-Jen Lee, Yen-Liang Chen, Chih-Ming Ke, Ho-yung David Hwang | 2017-06-27 |