Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740094 | Damage prevention on EUV mask | Kuan-Wen Lin, Ching-Wei Shen, Shu-Hsien Wu | 2017-08-22 |
| 9665000 | Method and system for EUV mask cleaning with non-thermal solution | Ching-Wei Shen, Kuan-Wen Lin | 2017-05-30 |
| 9612523 | Structure and method for reflective-type mask | Chih-Tsung Shih, Jeng-Horng Chen, Chia-Chen Chen, Shinn-Sheng Yu, Anthony Yen +1 more | 2017-04-04 |