Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740094 | Damage prevention on EUV mask | Kuan-Wen Lin, Chi-Lun Lu, Shu-Hsien Wu | 2017-08-22 |
| 9665000 | Method and system for EUV mask cleaning with non-thermal solution | Chi-Lun Lu, Kuan-Wen Lin | 2017-05-30 |