Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740094 | Damage prevention on EUV mask | Chi-Lun Lu, Ching-Wei Shen, Shu-Hsien Wu | 2017-08-22 |
| 9665000 | Method and system for EUV mask cleaning with non-thermal solution | Ching-Wei Shen, Chi-Lun Lu | 2017-05-30 |
| 9658526 | Mask pellicle indicator for haze prevention | Sheng-Chi Chin, Ting-Hao Hsu, Tzu-Ting Chou, Shu-Hsien Wu | 2017-05-23 |