Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740094 | Damage prevention on EUV mask | Kuan-Wen Lin, Chi-Lun Lu, Ching-Wei Shen | 2017-08-22 |
| 9658526 | Mask pellicle indicator for haze prevention | Kuan-Wen Lin, Sheng-Chi Chin, Ting-Hao Hsu, Tzu-Ting Chou | 2017-05-23 |