| 9779202 |
Process-induced asymmetry detection, quantification, and control using patterned wafer geometry measurements |
Pradeep Vukkadala, Jong Hoon Kim |
2017-10-03 |
| 9707660 |
Predictive wafer modeling based focus error prediction using correlations of wafers |
Pradeep Vukkadala, Wei Chang, Krishna Rao |
2017-07-18 |
| 9702829 |
Systems and methods for wafer surface feature detection and quantification |
Haiguang Chen, Sergey Kamensky, Enrique Chavez, Shouhong Tang, Mark Plemmons |
2017-07-11 |
| 9646379 |
Detection of selected defects in relatively noisy inspection data |
Haiguang Chen, Michael D. Kirk, Stephen Biellak |
2017-05-09 |
| 9632038 |
Hybrid phase unwrapping systems and methods for patterned wafer measurement |
Haiguang Chen |
2017-04-25 |
| 9588441 |
Method and device for using substrate geometry to determine optimum substrate analysis sampling |
Craig MacNaughton |
2017-03-07 |
| 9558545 |
Predicting and controlling critical dimension issues and pattern defectivity in wafers using interferometry |
Pradeep Vukkadala, Sathish Veeraraghavan, Soham Dey |
2017-01-31 |
| 9546862 |
Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool |
Haiguang Chen, Sergey Kamensky, Sathish Veeraraghavan, Pradeep Vukkadala |
2017-01-17 |