Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779202 | Process-induced asymmetry detection, quantification, and control using patterned wafer geometry measurements | Jaydeep Sinha, Jong Hoon Kim | 2017-10-03 |
| 9707660 | Predictive wafer modeling based focus error prediction using correlations of wafers | Jaydeep Sinha, Wei Chang, Krishna Rao | 2017-07-18 |
| 9558545 | Predicting and controlling critical dimension issues and pattern defectivity in wafers using interferometry | Sathish Veeraraghavan, Soham Dey, Jaydeep Sinha | 2017-01-31 |
| 9546862 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Haiguang Chen, Jaydeep Sinha, Sergey Kamensky, Sathish Veeraraghavan | 2017-01-17 |