Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9702829 | Systems and methods for wafer surface feature detection and quantification | Haiguang Chen, Jaydeep Sinha, Enrique Chavez, Shouhong Tang, Mark Plemmons | 2017-07-11 |
| 9546862 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Haiguang Chen, Jaydeep Sinha, Sathish Veeraraghavan, Pradeep Vukkadala | 2017-01-17 |