Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558545 | Predicting and controlling critical dimension issues and pattern defectivity in wafers using interferometry | Pradeep Vukkadala, Soham Dey, Jaydeep Sinha | 2017-01-31 |
| 9546862 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Haiguang Chen, Jaydeep Sinha, Sergey Kamensky, Pradeep Vukkadala | 2017-01-17 |