Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728430 | Electrostatic chuck with LED heating | Jason M. Schaller, Morgan Evans, Robert Brent Vopat, Paul E. Pergande, Julian G. Blake +2 more | 2017-08-08 |
| 9722129 | Complementary traveling masks | Nicholas P. T. Bateman, Benjamin Riordan | 2017-08-01 |
| 9694989 | Workpiece handling system and methods of workpiece handling | Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Malcolm N. Daniel, JR., Aaron P. Webb | 2017-07-04 |
| 9696097 | Multi-substrate thermal management apparatus | Kallol Bera, Kim Vellore, Andrew J. Constant, Jacob Newman, Jeffrey Blahnik +3 more | 2017-07-04 |
| 9669552 | System and method for quick-swap of multiple substrates | Robert Brent Vopat, Jason M. Schaller | 2017-06-06 |
| 9659677 | Shielding device for substrate edge protection and method of using same | Aaron P. Webb, Charles T. Carlson, Timothy J. Miller, James D. Strassner | 2017-05-23 |
| 9570309 | Mask alignment system for semiconductor processing | Aaron P. Webb, Charles T. Carlson, Christopher N. Grant | 2017-02-14 |