Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778561 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie +3 more | 2017-10-03 |
| 9659783 | High aspect ratio etch with combination mask | Joydeep Guha, Kaushik Chattopadhyay, Thomas W. Mountsier, Aaron Eppler, Thorsten Lill +2 more | 2017-05-23 |
| 9637821 | Method for supplying vaporized precursor | Damien Slevin, Brad Laird, Curtis Bailey, Ming Li, James Sims +2 more | 2017-05-02 |
| 9589799 | High selectivity and low stress carbon hardmask by pulsed low frequency RF power | Chunhai Ji, Xinyi Chen, Pramod Subramonium | 2017-03-07 |