Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633896 | Methods for formation of low-k aluminum-containing etch stop films | Daniel Damjanovic, Nagraj Shankar | 2017-04-25 |
| 9589799 | High selectivity and low stress carbon hardmask by pulsed low frequency RF power | Sirish Reddy, Chunhai Ji, Xinyi Chen | 2017-03-07 |
| 9570274 | Plasma activated conformal dielectric film deposition | Shankar Swaminathan, Jon Henri, Dennis M. Hausmann, Mandyam Sriram, Vishwanathan Rangarajan +3 more | 2017-02-14 |