Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589799 | High selectivity and low stress carbon hardmask by pulsed low frequency RF power | Sirish Reddy, Chunhai Ji, Pramod Subramonium | 2017-03-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589799 | High selectivity and low stress carbon hardmask by pulsed low frequency RF power | Sirish Reddy, Chunhai Ji, Pramod Subramonium | 2017-03-07 |