Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824930 | Method of patterning dopant films in high-k dielectrics in a soft mask integration scheme | Takashi Ando, Hemanth Jagannathan, Balaji Kannan, Siddarth A. Krishnan, Unoh Kwon | 2017-11-21 |
| 9721842 | Method of patterning dopant films in high-k dielectrics in a soft mask integration scheme | Takashi Ando, Hemanth Jagannathan, Balaji Kannan, Siddarth A. Krishnan, Unoh Kwon | 2017-08-01 |
| 9546321 | Compositions and methods for selectively etching titanium nitride | Jeffrey A. Barnes, Emanuel I. Cooper, Li-Min Chen, Steven Lippy, Sheng-Hung Tu | 2017-01-17 |