| 9833875 |
Polishing apparatus and retainer ring configuration |
— |
2017-12-05 |
| 9815171 |
Substrate holder, polishing apparatus, polishing method, and retaining ring |
Satoru Yamaki, Hozumi Yasuda, Keisuke Namiki, Makoto Fukushima, Shingo Togashi |
2017-11-14 |
| D799437 |
Substrate retaining ring |
Hozumi Yasuda, Makoto Fukushima, Shingo Togashi, Keisuke Namiki, Satoru Yamaki |
2017-10-10 |
| D794585 |
Retainer ring for substrate |
Hozumi Yasuda, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Satoru Yamaki |
2017-08-15 |
| 9724797 |
Polishing apparatus |
Tetsuji Togawa, Makoto Fukushima, Hozumi Yasuda |
2017-08-08 |
| D793976 |
Substrate retaining ring |
Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Shingo Togashi, Satoru Yamaki |
2017-08-08 |
| 9687957 |
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method |
Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more |
2017-06-27 |
| 9662764 |
Substrate holder, polishing apparatus, and polishing method |
Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Shingo Togashi, Satoru Yamaki |
2017-05-30 |
| 9662761 |
Polishing apparatus |
Hiroyuki Shinozaki, Nobuyuki Takahashi, Toru Maruyama, Suguru Sakugawa |
2017-05-30 |
| 9573244 |
Elastic membrane, substrate holding apparatus, and polishing apparatus |
Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Shingo Togashi, Satoru Yamaki +1 more |
2017-02-21 |
| 9550271 |
Substrate holding apparatus and polishing apparatus |
Hozumi Yasuda, Makoto Fukushima, Masahiko Kishimoto |
2017-01-24 |