| 9815171 |
Substrate holder, polishing apparatus, polishing method, and retaining ring |
Satoru Yamaki, Hozumi Yasuda, Osamu Nabeya, Makoto Fukushima, Shingo Togashi |
2017-11-14 |
| D799437 |
Substrate retaining ring |
Osamu Nabeya, Hozumi Yasuda, Makoto Fukushima, Shingo Togashi, Satoru Yamaki |
2017-10-10 |
| D794585 |
Retainer ring for substrate |
Osamu Nabeya, Hozumi Yasuda, Makoto Fukushima, Shingo Togashi, Satoru Yamaki |
2017-08-15 |
| D793976 |
Substrate retaining ring |
Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Shingo Togashi, Satoru Yamaki |
2017-08-08 |
| 9676076 |
Polishing method and polishing apparatus |
Hozumi Yasuda, Shingo Togashi |
2017-06-13 |
| 9662764 |
Substrate holder, polishing apparatus, and polishing method |
Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Shingo Togashi, Satoru Yamaki |
2017-05-30 |
| 9573241 |
Polishing apparatus and polishing method |
Makoto Fukushima, Hozumi Yasuda |
2017-02-21 |
| 9573244 |
Elastic membrane, substrate holding apparatus, and polishing apparatus |
Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more |
2017-02-21 |