Issued Patents 2017
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9815171 | Substrate holder, polishing apparatus, polishing method, and retaining ring | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Shingo Togashi | 2017-11-14 |
| D799437 | Substrate retaining ring | Osamu Nabeya, Makoto Fukushima, Shingo Togashi, Keisuke Namiki, Satoru Yamaki | 2017-10-10 |
| D794585 | Retainer ring for substrate | Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Satoru Yamaki | 2017-08-15 |
| 9724797 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Makoto Fukushima | 2017-08-08 |
| D793976 | Substrate retaining ring | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2017-08-08 |
| 9676076 | Polishing method and polishing apparatus | Keisuke Namiki, Shingo Togashi | 2017-06-13 |
| 9662764 | Substrate holder, polishing apparatus, and polishing method | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2017-05-30 |
| 9573241 | Polishing apparatus and polishing method | Makoto Fukushima, Keisuke Namiki | 2017-02-21 |
| 9573244 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2017-02-21 |
| 9550271 | Substrate holding apparatus and polishing apparatus | Makoto Fukushima, Osamu Nabeya, Masahiko Kishimoto | 2017-01-24 |