Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9550271 | Substrate holding apparatus and polishing apparatus | Hozumi Yasuda, Makoto Fukushima, Osamu Nabeya | 2017-01-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9550271 | Substrate holding apparatus and polishing apparatus | Hozumi Yasuda, Makoto Fukushima, Osamu Nabeya | 2017-01-24 |