Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9687957 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2017-06-27 |
| 9673067 | Substrate processing apparatus and processed substrate manufacturing method | Toshio Yokoyama, Mitsuru Miyazaki, Teruaki HOMBO, Naoki Toyomura | 2017-06-06 |