Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D795315 | Dresser disk | Kuniaki Yamaguchi, Naoki Toyomura, Takuya Inoue | 2017-08-22 |
| 9700988 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Naoki Toyomura, Takuya Inoue | 2017-07-11 |
| 9687957 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2017-06-27 |
| D790489 | Vacuum contact pad | Naoki Toyomura | 2017-06-27 |
| 9673067 | Substrate processing apparatus and processed substrate manufacturing method | Toshio Yokoyama, Junji Kunisawa, Teruaki HOMBO, Naoki Toyomura | 2017-06-06 |
| 9558971 | Substrate holding apparatus and substrate cleaning apparatus | Takuya Inoue | 2017-01-31 |