Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9700988 | Substrate processing apparatus | Kuniaki Yamaguchi, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2017-07-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9700988 | Substrate processing apparatus | Kuniaki Yamaguchi, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2017-07-11 |