Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786532 | Substrate processing apparatus and method of transferring a substrate | Masahiko Sekimoto, Kenichi Kobayashi, Kenichi Akazawa, Takashi Mitsuya, Keiichi Kurashina | 2017-10-10 |
| 9673067 | Substrate processing apparatus and processed substrate manufacturing method | Junji Kunisawa, Mitsuru Miyazaki, Teruaki HOMBO, Naoki Toyomura | 2017-06-06 |
| 9666469 | Lifting device, substrate processing apparatus having lifting device, and unit transferring method | Hiroyuki Shinozaki, Kenji Shinkai, Tadakazu Sone, Hideo Aizawa, Hiroshi Aono | 2017-05-30 |