Issued Patents 2017
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9849557 | Coupling mechanism, substrate polishing apparatus, method of determining position of rotational center of coupling mechanism, program of determining position of rotational center of coupling mechanism, method of determining maximum pressing load of rotating body, and program of determining maximum pressing load of rotating body | — | 2017-12-26 |
| 9808908 | Method of monitoring a dressing process and polishing apparatus | — | 2017-11-07 |
| 9757838 | Polishing apparatus having end point detecting apparatus detecting polishing end point on basis of current and sliding friction | — | 2017-09-12 |
| 9707661 | Polishing method and polishing apparatus | — | 2017-07-18 |
| 9687957 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2017-06-27 |
| 9687958 | Wet treatment apparatus and substrate treatment apparatus provided with the same | — | 2017-06-27 |
| 9666469 | Lifting device, substrate processing apparatus having lifting device, and unit transferring method | Kenji Shinkai, Tadakazu Sone, Hideo Aizawa, Hiroshi Aono, Toshio Yokoyama | 2017-05-30 |
| 9662761 | Polishing apparatus | Nobuyuki Takahashi, Toru Maruyama, Suguru Sakugawa, Osamu Nabeya | 2017-05-30 |
| 9616545 | Exhaust flow rate control apparatus and substrate processing apparatus provided therewith | — | 2017-04-11 |
| 9550268 | Substrate holding apparatus and polishing apparatus | — | 2017-01-24 |
| 9539699 | Polishing method | — | 2017-01-10 |