Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9764446 | Rotary joint and polishing apparatus | Tadakazu Sone, Masao Umemoto, Ryuichi Kosuge | 2017-09-19 |
| 9724798 | Cover for component of polishing apparatus, component of polishing apparatus, and polishing apparatus | Kenji Shinkai, Tadakazu Sone, Hiroshi Aono | 2017-08-08 |
| 9666469 | Lifting device, substrate processing apparatus having lifting device, and unit transferring method | Hiroyuki Shinozaki, Kenji Shinkai, Tadakazu Sone, Hiroshi Aono, Toshio Yokoyama | 2017-05-30 |