Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786532 | Substrate processing apparatus and method of transferring a substrate | Toshio Yokoyama, Masahiko Sekimoto, Kenichi Kobayashi, Takashi Mitsuya, Keiichi Kurashina | 2017-10-10 |