Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793163 | Subtractive self-aligned via and plug patterning for back end of line (BEOL) interconnects | Florian Gstrein, Richard E. Schenker, Paul A. Nyhus, Charles H. Wallace, Hui Jae Yoo | 2017-10-17 |
| 9570349 | Non-lithographically patterned directed self assembly alignment promotion layers | Rami Hourani, Eungnak Han, James M. Blackwell | 2017-02-14 |
| 9553018 | Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects | Kevin Lin, Kanwal Jit Singh, Alan M. Myers, Richard E. Schenker | 2017-01-24 |
| 9548269 | Diagonal hardmasks for improved overlay in fabricating back end of line (BEOL) interconnects | Alan M. Myers, Kanwal Jit Singh, Jasmeet S. Chawla | 2017-01-17 |