Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793163 | Subtractive self-aligned via and plug patterning for back end of line (BEOL) interconnects | Robert L. Bristol, Florian Gstrein, Paul A. Nyhus, Charles H. Wallace, Hui Jae Yoo | 2017-10-17 |
| 9659860 | Method and structure to contact tight pitch conductive layers with guided vias | Elliot N. Tan | 2017-05-23 |
| 9553018 | Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects | Robert L. Bristol, Kevin Lin, Kanwal Jit Singh, Alan M. Myers | 2017-01-24 |