| 9754886 |
Semiconductor interconnect structures |
Boyan Boyanov, James S. Clarke, Alan M. Myers |
2017-09-05 |
| 9659869 |
Forming barrier walls, capping, or alloys /compounds within metal lines |
Christopher J. Jezewski, Alan M Meyers, Tejaswi K. Indukuri, James S. Clarke, Florian Gstrein |
2017-05-23 |
| 9627321 |
Methods and apparatuses to form self-aligned caps |
Boyan Boyanov |
2017-04-18 |
| 9565766 |
Formation of DRAM capacitor among metal interconnect |
Nick Lindert, Joseph M. Steigerwald |
2017-02-07 |
| 9553018 |
Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects |
Robert L. Bristol, Kevin Lin, Alan M. Myers, Richard E. Schenker |
2017-01-24 |
| 9548269 |
Diagonal hardmasks for improved overlay in fabricating back end of line (BEOL) interconnects |
Alan M. Myers, Robert L. Bristol, Jasmeet S. Chawla |
2017-01-17 |