Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754886 | Semiconductor interconnect structures | Boyan Boyanov, James S. Clarke, Alan M. Myers | 2017-09-05 |
| 9659869 | Forming barrier walls, capping, or alloys /compounds within metal lines | Christopher J. Jezewski, Alan M Meyers, Tejaswi K. Indukuri, James S. Clarke, Florian Gstrein | 2017-05-23 |
| 9627321 | Methods and apparatuses to form self-aligned caps | Boyan Boyanov | 2017-04-18 |
| 9565766 | Formation of DRAM capacitor among metal interconnect | Nick Lindert, Joseph M. Steigerwald | 2017-02-07 |
| 9553018 | Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects | Robert L. Bristol, Kevin Lin, Alan M. Myers, Richard E. Schenker | 2017-01-24 |
| 9548269 | Diagonal hardmasks for improved overlay in fabricating back end of line (BEOL) interconnects | Alan M. Myers, Robert L. Bristol, Jasmeet S. Chawla | 2017-01-17 |