Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793163 | Subtractive self-aligned via and plug patterning for back end of line (BEOL) interconnects | Robert L. Bristol, Florian Gstrein, Richard E. Schenker, Paul A. Nyhus, Hui Jae Yoo | 2017-10-17 |
| 9793159 | Previous layer self-aligned via and plug patterning for back end of line (BEOL) interconnects | Paul A. Nyhus, Elliot N. Tan, Swaminathan Sivakumar | 2017-10-17 |
| 9716037 | Gate aligned contact and method to fabricate same | Oleg Golonzka, Swaminathan Sivakumar, Tahir Ghani | 2017-07-25 |
| 9679845 | Necked interconnect fuse structure for integrated circuits | Zhanping Chen, Andrew W. Yeoh, Seongtae Jeong, Uddalak Bhattacharya | 2017-06-13 |
| 9666451 | Self-aligned via and plug patterning for back end of line (BEOL) interconnects | Paul A. Nyhus | 2017-05-30 |
| 9666442 | Methods for single exposure—self-aligned double, triple, and quadruple patterning | Fitih M. Cinnor | 2017-05-30 |
| 9558947 | Pattern decomposition lithography techniques | Hossam M. Abdallah, Elliot N. Tan, Swaminathan Sivakumar, Oleg Golonzka, Robert M. Bigwood | 2017-01-31 |