Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685756 | Laser amplifier, laser apparatus, and extreme ultraviolet light generating system | Hideo Hoshino | 2017-06-20 |
| 9680277 | Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier | Krzysztof Nowak, Takashi Saito, Yasufumi Kawasuji | 2017-06-13 |
| 9667019 | Laser apparatus and extreme ultraviolet light generation system | Masato Moriya, Osamu Wakabayashi | 2017-05-30 |
| 9647406 | Laser unit and extreme ultraviolet light generating system | Takayuki Yabu, Osamu Wakabayashi, Seiji Nogiwa | 2017-05-09 |