Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837779 | Laser apparatus and laser apparatus manufacturing method | Yasufumi Kawasuji | 2017-12-05 |
| 9685756 | Laser amplifier, laser apparatus, and extreme ultraviolet light generating system | Takashi Suganuma | 2017-06-20 |