Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837779 | Laser apparatus and laser apparatus manufacturing method | Hideo Hoshino | 2017-12-05 |
| 9762024 | Laser apparatus and extreme ultraviolet light generation system | Yoshiaki Kurosawa | 2017-09-12 |
| 9680277 | Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier | Krzysztof Nowak, Takashi Suganuma, Takashi Saito | 2017-06-13 |