Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9680277 | Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier | Takashi Suganuma, Takashi Saito, Yasufumi Kawasuji | 2017-06-13 |
| 9570884 | Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light | Osamu Wakabayashi | 2017-02-14 |