Issued Patents 2017
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9853410 | Gas laser device and control method therefor | Takeshi Asayama, Hiroaki TSUSHIMA, Kouji Kakizaki | 2017-12-26 |
| 9847618 | Laser apparatus | Seiji Nogiwa | 2017-12-19 |
| 9841684 | Light source apparatus and data processing method | Hiroshi Tanaka, Akihiko KUROSU, Hiroyuki Masuda, Hideyuki Ochiai, Masato Moriya | 2017-12-12 |
| 9837780 | Excimer laser apparatus and excimer laser system | Takeshi Asayama, Kouji Kakizaki | 2017-12-05 |
| 9835495 | Light beam measurement device, laser apparatus, and light beam separator | Masato Moriya, Yoshinobu WATABE | 2017-12-05 |
| 9825417 | Laser unit and non-transitory computer-readable storage medium | Akihiko KUROSU, Takashi Matsunaga, Hiroyuki Masuda, Hiroaki TSUSHIMA, Masanori YASHIRO +1 more | 2017-11-21 |
| 9812841 | Lasersystem | Takashi Onose, Kouji Kakizaki | 2017-11-07 |
| 9806490 | Laser system | Hiroshi Umeda, Takeshi Asayama | 2017-10-31 |
| 9791780 | Exposure apparatus | Takashi Onose, Kouji Kakizaki, Akiyoshi Suzuki | 2017-10-17 |
| 9722384 | Gas laser apparatus | Natsushi Suzuki, Hiroaki TSUSHIMA, Masanori YASHIRO | 2017-08-01 |
| 9711934 | Laser apparatus | Takashi Matsunaga | 2017-07-18 |
| 9667019 | Laser apparatus and extreme ultraviolet light generation system | Masato Moriya, Takashi Suganuma | 2017-05-30 |
| 9661730 | Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target | Atsushi Ueda, Takayuki Yabu, Georg Soumagne, Takashi Saito | 2017-05-23 |
| 9647415 | Laser apparatus and method of controlling laser apparatus | Hiroaki TSUSHIMA, Takashi Matsunaga | 2017-05-09 |
| 9647411 | Method of controlling wavelength of laser beam and laser apparatus | Takashi Matsunaga, Takahito Kumazaki | 2017-05-09 |
| 9647406 | Laser unit and extreme ultraviolet light generating system | Takashi Suganuma, Takayuki Yabu, Seiji Nogiwa | 2017-05-09 |
| 9622332 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Hiroshi Tanaka, Hideyuki Hayashi | 2017-04-11 |
| 9601893 | Laser apparatus | Kouji Kakizaki, Takeshi Asayama | 2017-03-21 |
| 9578730 | Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system | Tamotsu Abe | 2017-02-21 |
| 9574935 | System for generating extreme ultra violet light | Masato Moriya | 2017-02-21 |
| 9570884 | Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light | Krzysztof Nowak | 2017-02-14 |
| 9538629 | Chamber for extreme ultraviolet light generation apparatus, and extreme ultraviolet light generation apparatus | Takashi Saito, Naoyoshi IMACHI | 2017-01-03 |