Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9686845 | Extreme ultraviolet light generation apparatus | Toru Suzuki | 2017-06-20 |
| 9661730 | Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target | Atsushi Ueda, Osamu Wakabayashi, Georg Soumagne, Takashi Saito | 2017-05-23 |
| 9647406 | Laser unit and extreme ultraviolet light generating system | Takashi Suganuma, Osamu Wakabayashi, Seiji Nogiwa | 2017-05-09 |