Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841684 | Light source apparatus and data processing method | Hiroshi Tanaka, Akihiko KUROSU, Hiroyuki Masuda, Hideyuki Ochiai, Osamu Wakabayashi | 2017-12-12 |
| 9835495 | Light beam measurement device, laser apparatus, and light beam separator | Osamu Wakabayashi, Yoshinobu WATABE | 2017-12-05 |
| 9667019 | Laser apparatus and extreme ultraviolet light generation system | Takashi Suganuma, Osamu Wakabayashi | 2017-05-30 |
| 9574935 | System for generating extreme ultra violet light | Osamu Wakabayashi | 2017-02-21 |