Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9853410 | Gas laser device and control method therefor | Takeshi Asayama, Hiroaki TSUSHIMA, Osamu Wakabayashi | 2017-12-26 |
| 9837780 | Excimer laser apparatus and excimer laser system | Takeshi Asayama, Osamu Wakabayashi | 2017-12-05 |
| 9812841 | Lasersystem | Takashi Onose, Osamu Wakabayashi | 2017-11-07 |
| 9791780 | Exposure apparatus | Takashi Onose, Osamu Wakabayashi, Akiyoshi Suzuki | 2017-10-17 |
| 9748727 | Preliminary ionization discharge device and laser apparatus | Hiroaki TSUSHIMA, Junichi Fujimoto, Natsushi Suzuki, Hisakazu KATSUUMI | 2017-08-29 |
| 9742141 | Laser chamber | Hiroaki TSUSHIMA, Takashi Matsunaga, Takeshi Asayama, Hisakazu KATSUUMI, Hiroshi Umeda +1 more | 2017-08-22 |
| 9722385 | Laser chamber | Hiroyuki Ikeda, Hiroaki TSUSHIMA, Hisakazu KATSUUMI | 2017-08-01 |
| 9601893 | Laser apparatus | Takeshi Asayama, Osamu Wakabayashi | 2017-03-21 |