Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9725389 | Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition | Hwan-Sung Cheon, Youn-Jin Cho, Yong-Woon Yoon, Chung-Heon Lee, Hyo-Young Kwon +1 more | 2017-08-08 |
| 9683114 | Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition | Hea-Jung Kim, Sung Hwan Kim, Youn-Hee Nam, Joon-Young Moon, Hyun-Ji SONG +2 more | 2017-06-20 |
| 9671688 | Monomer for hardmask composition, hardmask composition including said monomer, and method for forming pattern using said hardmask composition | Seung-Wook SHIN, Hea-Jung Kim, Youn-Jin Cho, Yoo-Jeong Choi | 2017-06-06 |
| 9665003 | Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Go-Un Kim, Young Min Kim, Hea-Jung Kim, Joon-Young Moon +8 more | 2017-05-30 |
| 9556094 | Monomer, hardmask composition including monomer, and method for forming pattern by using hardmask composition | Hyo-Young Kwon, Hea-Jung Kim, Chung-Heon Lee, Youn-Jin Cho, Yoo-Jeong Choi | 2017-01-31 |