Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9671688 | Monomer for hardmask composition, hardmask composition including said monomer, and method for forming pattern using said hardmask composition | Yun-Jun Kim, Hea-Jung Kim, Youn-Jin Cho, Yoo-Jeong Choi | 2017-06-06 |
| 9665003 | Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Hea-Jung Kim +8 more | 2017-05-30 |