Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9845444 | Cleaning composition after chemical mechanical polishing of organic film and cleaning method using the same | Ahn-Ho Lee, Chung-Kyung Jung, Dong Min KANG, Dong-Hun Kang, Dong Jin Kim +5 more | 2017-12-19 |
| 9738787 | Composition for forming silica-based insulating layer, method for preparing composition for forming silica-based insulating layer, silica-based insulating layer, and method for manufacturing silica-based insulating layer | Hui-Chan Yun, Taek-Soo Kwak, Mi Young Kim, Sang-Hak Lim, Kwen-Woo Han +8 more | 2017-08-22 |
| 9665003 | Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Yun-Jun Kim, Young Min Kim, Hea-Jung Kim, Joon-Young Moon +8 more | 2017-05-30 |